| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d92e31d7a888e78c621c7604a7f2969f |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3405 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-35
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-34 |
| filingDate |
1991-03-09^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1999-11-11^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_60b8b353739a66f74232a13844e4250a |
| publicationDate |
1999-11-11^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-4107711-C2 |
| titleOfInvention |
Method and device for depositing doped layers or chemical compounds or alloys using a magnetron cathode |
| priorityDate |
1991-03-09^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |