| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_aa67eb74ea5b96d9f8f2cfdb3b025770 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S134-902 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B3-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01F25-433
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24C1-003
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01F23-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24C3-322
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01F25-4335 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24C1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B3-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24C3-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01F23-30 |
| filingDate |
1988-04-21^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1994-02-14^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_68d25450b61f246ab670c48a6b219f9c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_902b11dbfb5270de07d87d17187a863b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_03761bd7628e065f9b960a4ca85adad3 |
| publicationDate |
1994-02-14^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DK-168107-B1 |
| titleOfInvention |
APPARATUS AND PROCEDURE FOR REMOVING SMALL PARTICLES FROM A SUBSTRATE |
| priorityDate |
1987-04-22^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |