| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5202091df9de019fc995f2d266f9ecc2 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-3342 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32091
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32532
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32623
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-302 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F4-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate |
1988-01-12^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d0c6553606e71c6a069359b754deba6f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5f63921e921e1d0835c2af1adc3eb1cd |
| publicationDate |
1988-07-20^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-0275188-A2 |
| titleOfInvention |
Improved plasma stripper with multiple contact point cathode |
| abstract |
An improved plasma stripping apparatus with external electrodes is provided wherein the cathode (21) has multiple small area contact points adjacent and in close proximity to or uniformly touching the reactor chamber (11) to cause areas of high r.f. field densities that enhance the gas breakdown in the plasma to obtain high rate film removal. |
| priorityDate |
1987-01-12^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |