| abstract |
A negative working, radiation-sensitive mixture has been described, which consists of a binder and a 1,2,3-thiadiazole group-containing polymer.n n n A multifunctional compound is used as the binder, the functional groups of which react with ketene; a compound is used as the polymer, which is obtained by polymerizing a compound of the general formula I arises in which R denotes a polymerizable group.n n n If the polymer is a copolymer in which comonomers contain compounds which have functional groups which can react with ketene, the binder can be dispensed with. n n n The negative working, radiation-sensitive mixture described is particularly suitable for UV, electron and X-ray lithography. |