| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01Q60-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01Q60-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01Q60-04 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-09
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B7-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q60-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q60-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q70-02 |
| filingDate |
1989-08-16^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1992-12-16^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
1992-12-16^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-0413042-B1 |
| titleOfInvention |
Method of producing micromechanical sensors for the afm/stm profilometry and micromechanical afm/stm sensor head |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8373428-B2 |
| priorityDate |
1989-08-16^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |