| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0aaae00479c8b1b24221e4f3e983dbac |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S148-043
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76819
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-522
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-5329 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-532
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-522
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31 |
| filingDate |
1990-08-10^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a7c0d59fd4b23ebc95ec3019a8dc1f2b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ccc622b20d8c9bb0dd3055cb1bd901a8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7d2f2b9af7c930f878eb377215484014 |
| publicationDate |
1991-04-03^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-0420405-A2 |
| titleOfInvention |
Integrated circuit comprising interconnections |
| abstract |
A multilevel electrically conductive interconnect (12,20) is provided for an integrated circuit wherein an intermediate dual dielectric layer (18) is formed between the non-contacting portions of the conductors forming the conductive interconnect. The dual dielectric layer consists of a first dielectric layer (14) and a second dielectric layer (16), the latter, being formed from a polyimide material. The dual dielectric layer provides a significant improvement in defect density and a substantially planarized surface (26) for the deposition of the top conductor (20), thereby improving the reliability and integrity of the electrical interconnection and of the integrated circuit. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5818111-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6054769-A |
| priorityDate |
1989-08-31^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |