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publicationDate 1992-05-20^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber EP-0486475-A2
titleOfInvention Amorphous oxide film and article having such film thereon
abstract An amorphous oxide film composed essentially of an oxide containing at least one member selected from the group consisting of Zr, Ti, Hf, Sn, Ta and In and at least one member selected from the group consisting of B and Si.
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