| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_35f5220e8e6a788ab47f4717ab30f2dc |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-12736
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-12528 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C22C21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-53219
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3205 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C22C21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-285
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-532 |
| filingDate |
1992-01-17^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1997-05-28^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0ed218d0c27352205559de0a2a81bb80
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_43d2f8d1fcd5f3d221a04f953138a1da |
| publicationDate |
1997-05-28^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-0521163-B1 |
| titleOfInvention |
Aluminum alloy wiring layer, manufacturing thereof, and aluminum alloy sputtering target |
| abstract |
An aluminum alloy wiring layer includes only scandium of 0.01-1.0 weight %, or includes scandium of 0.01-1.0 weight % and at least one kind of element of 0.1-3.0 weight % selected from the group comprising silicon, titanium, copper, boron, hafnium and rare earth elements (but scandium is excluded). The residual part of the aluminum alloy wiring layer is aluminum of 99.99 % or more in purity. This wiring layer, its manufacturing method and an aluminum alloy sputtering target used therein are suitable to large scale integrated circuits of the next generation. |
| priorityDate |
1991-01-17^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |