| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c5520dd38cc403678d9f91e0b0ee95fb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_38e136555b421e3d93138177b05a40a3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2dcebf5a7f7ddc3b081f70e8ce1c4097 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B41-5027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B41-85
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B29-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B41-009
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B41-87
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B23-002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B41-5072
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B23-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B29-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-24 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C8-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B41-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C8-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-58
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B41-87
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B23-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B41-85
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-24 |
| filingDate |
1992-07-10^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b2a6393c4fa7b35092fa387b897fdef5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c3b001609d304c984ed4327d45a01a52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cd98bc6339fd5bb7e610eecc16fa7abf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7bf0065746ff65205a1a5174faf2f9ff |
| publicationDate |
1993-01-13^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-0522866-A1 |
| titleOfInvention |
Method and apparatus for producing oxide thin film |
| abstract |
Disclosed is an oxide thin film producing method and apparatus for producing an oxide thin film having excellent crystallinity and purity with high productivity while correctly controlling the composition of the oxide thin film. After reducing the pressure inside a vacuum chamber (1) to 1 x 10⁻⁹ Torr or less, a metal thin film is formed by evaporating a specified metal element and depositing vapor of the metal element on a substrate (3) in the vacuum chamber (1). Then a cover member (7) is moved upward to closely abut a cover receiving member (10) to thereby form an airtight chamber for enclosing the substrate (3) airtightly in the vacuum chamber (1). With the degree of vacuum around the airtight chamber maintained, O₂ gas is directly introduced into the airtight chamber through a gas piping (8) to oxidize the metal thin film and thereby form an oxide thin film. At the same time, the gas inside the airtight chamber is discharged directly out of the vacuum chamber (1) through a gas piping (15). |
| priorityDate |
1991-07-10^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |