| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1e70c0aeade92d7571d955d3b90ea06e |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-312
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02118
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02334
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02282 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L101-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08K5-00 |
| filingDate |
1992-10-12^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cc4b4b30c7a8db050bef0caab0fb43a9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_68efdc752df74ad1215a6af7d7018ecc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0c2d81b6d5177cf054af85fa20ee87b7 |
| publicationDate |
1993-05-19^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-0541969-A1 |
| titleOfInvention |
Method and compositions for diffusion patterning |
| abstract |
Method for patterning organic polymer layers comprising the sequential steps:n A. Applying to a substrate an unpatterned layer of solid acid labile polymer; B. Applying to the unpatterned layer a patterned second layer comprising a liquid solution of organic acid and volatile solvent; C. Heating the patterned layer to effect removal of the volatile solvent from the layer and diffusion of the organic acid into the underlying areas of the first layer; and D. Washing the layers with aqueous base solution to remove the solubilized acid labile polymer from the patterned areas of the layers. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0742487-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-9600931-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0583714-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0583714-A3 |
| priorityDate |
1991-11-14^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |