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classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004
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classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
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filingDate 1993-05-27^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2a4efb9306999467d2054635db96e602
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e7012312751dae98fa19637776bd9c75
publicationDate 1993-12-08^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber EP-0573220-A2
titleOfInvention Dyed i-line positive-working radiation sensitive mixtures
abstract A radiation-sensitive composition comprises an admixture in a solvent of: at least one alkali-soluble binder resin, at least one photoactive compound and an effective absorbence increasing amount of BLANKOPHOR FBW actinic dye; the amount of said binder resin being about 60 ato 95% by weight, the amount of said photoactive component being about 5% to about 40% by weight, based on the total solids content of said radiation-sensitive composition.
priorityDate 1992-06-01^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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