http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0955642-A2

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filingDate 1999-04-27^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b2876b09f53eb04af1de517dcbc77388
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eb3798807187de7dbbff4f2b66ac4ec9
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publicationDate 1999-11-10^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber EP-0955642-A2
titleOfInvention Formation of thin films resistors
abstract The invention is directed to thin film resistors which may be embedded in multi-layer printed circuit boards. The invention is also directed to structures for forming such thin film resistors and to methods for forming such structures, including the use of combustion chemical vapor deposition. The invention is also directed to chemical precursor solutions by which resistive materials can be deposited on a substrate by combustion chemical vapor deposition techniques.
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priorityDate 1998-04-29^^<http://www.w3.org/2001/XMLSchema#date>
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