Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_205ef3efc4027b8a493914cc4c917f0a |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B2006-12102 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B6-4246 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B2006-12114 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B2006-12176 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B6-122 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B6-42 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L33-005 |
classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B6-12 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B6-122 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B1-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B5-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L33-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C1-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B6-42 |
filingDate |
1999-07-29^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e00d0d7d56830983b822fb20333d52ba http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5b40fe40b4d8508a930fd3366c3461e6 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6919ba383fed5dbebf9e9eabc009c903 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_36e7f7c882e724e72e9b7f14dff8cb51 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8610709741552f18edeebad6fe2ecd98 |
publicationDate |
2000-02-23^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
EP-0981168-A2 |
titleOfInvention |
Semiconductor micro-optical components and method for producing them |
abstract |
A method for fabricating a monolithic micro-optical component. Thenconstruction of the micro-optical components is accomplished by usingnstandard semiconductor fabrication techniques. The method comprisesnthe steps of depositing an etch stop layer (44) onto a semiconductornsubstrate (42); depositing an optical component layer (46) onto the etchnstop layer (44); coating the entire surface of the optical component layernwith a photoresist material; applying a photoresist mask (50) to thenphotoresist material on the optical component layer (46); selectively etchingnaway the optical component layer (46) to form at least one optical columnn(52); forming a pedestal (54) for each of the optical columns (52) bynselectively etching away the etch stop layer (44); and finally polishing eachnof the optical columns (52), thereby forming monolithic optical componentsn(56). The method may optionally include the step of removing thenphotoresist mask from each of the optical columns prior to polishing thenoptical columns, as well as the step of depositing an antireflectivity coatingnonto each of the optical components. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7179728-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-10142010-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108666390-A |
priorityDate |
1998-08-18^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |