http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1032828-A4

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publicationDate 2001-05-09^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber EP-1032828-A4
titleOfInvention ELECTROMAGNETIC FORCE DETECTOR HAVING AN OVERFLOWING PART, FOR ELECTROSTATIC FORCE MICROSCOPE
abstract An atomic force microscope using a cantilevered sensor (12) which is influenced by an electrostatic force given by the charge in the Unit Under Test (40). The cantilever sensor is preferably made of nickel foil. Both charge distribution and thickness of the sample are plotted in a 3D graph.
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