http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1041667-A3

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filingDate 2000-03-30^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_58a2f7eed43c8b365ae7771e7dfa4b13
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publicationDate 2001-08-16^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber EP-1041667-A3
titleOfInvention Cavity resonator for reducing phase noise of voltage controlled oscillator and method for fabricating the same
abstract A cavity resonator for reducing the phase noise of microwaves or millimetre wavesnoutput from a monolithic microwave integrated circuit (MMIC) voltage controlled oscillatorn(VCO) by using silicon (Si) or a compound semiconductor and a micro electro mechanicalnsystem (MEMS), and a method for fabricating the cavity resonator are provided. In thencavity resonator, instead of an existing metal cavity, a cavity which is obtained by finelynprocessing silicon or a compound semiconductor is coupled to a microstrip line (30) to allownthe cavity resonator to be adopted in a reflection type voltage controlled oscillator. A polen(40) is provided to connect the edge of the microstrip line (30) to a predetermined locationnof a cavity lower thin film (10). A coupling slot (50) is formed by removing anpredetermined width of a cavity upper thin film (20) adjacent to the pole (40) which comesnin contact with the cavity upper thin film (20). A resistive thin film (60) for impedancenmatching is formed around the cavity lower thin film (10) which comes in contact with thenpole (40). Consequently, the cavity resonator reduces the phase noise of microwaves ornmillimetre waves which are output from a voltage controlled oscillator.
priorityDate 1999-03-31^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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