| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31695
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02337
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02362
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02129
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B37-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02214
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02282
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02203
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02359
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-20 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-522
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B37-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 |
| filingDate |
2001-04-11^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b04ef119a943a850876a74d90c9bde36 |
| publicationDate |
2001-10-17^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-1146014-A2 |
| titleOfInvention |
Mesoporous silica films with mobile ion gettering and accelerated processing |
| abstract |
The present invention generally provides a process and an apparatus for depositingnlow dielectric constant films on a substrate. The low dielectric constant films are phosphorusndoped mesoporous oxide films formed by depositing and curing a phosphorus containing sol-gelnprecursor to form an oxide film having interconnecting pores of uniform diameter, andnthen annealing the film in an inert gas atmosphere or exposing the film to an oxidizingnatmosphere containing a reactive oxygen species to form a phosphorus doped mesoporousnoxide film. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9847355-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114005733-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114005733-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-101792470-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-101792470-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104086591-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104086591-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1885378-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1885378-A2 |
| priorityDate |
2000-04-11^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |