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publicationDate 2001-11-21^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber EP-1155164-A1
titleOfInvention In situ chemical generator and method
abstract Chemical generator and method for generating a chemical species at a point of use such as the chamber of a reactor in which a workpiece such as a semiconductor wafer is to be processed. The species is generated by creating free radicals, and combining the free radicals to form the chemical species at the point of use.
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