| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_069a92549123806a5d654dc036a676e9 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2201-0376
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-108
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-07
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2201-09036 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25F3-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25F7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-107
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76864
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76843
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-7684
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76849
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76838
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2885
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32134
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32115
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-288 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-07 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-288
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25F3-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25F7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-321
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3213
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 |
| filingDate |
2001-06-29^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d245d2827b04587ed998ef15c87adf2b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_92ef930a285ce745d8e16f99cd5db4ea
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f28610a4b7ee1b3dda92996d2fdf2d3d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2e1cad776ffa3aecdb6aec996c4072a5 |
| publicationDate |
2002-01-02^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-1167585-A2 |
| titleOfInvention |
Method and apparatus for forming interconnects, and polishing liquid and polishing method |
| abstract |
There are provided a method and apparatus for formingninterconnects by embedding a metal such as copper (Cu) intonrecesses for interconnects formed on the surface of ansubstrate such as a semiconductor substrate. The method ofnthe present invention includes the steps of: providing ansubstrate having fine recesses formed in the surface;nsubjecting the surface of the substrate to plating in anplating liquid; and subjecting the plated film formed on thensurface of the substrate to electrolytic etching in an etchingnliquid. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6943112-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6984301-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7247558-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/GB-2434159-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7375014-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/GB-2434159-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7485561-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7348234-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7344977-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-100379898-C
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-100447303-C
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7884016-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2006037584-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1489204-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7282131-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1489204-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2004085706-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7625814-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7273778-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2004079807-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2004010464-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7638030-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7179716-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7179361-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-100334691-C |
| priorityDate |
2000-06-29^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |