| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b1c5f332dddaff914ed798fc54999535 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B57-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-015 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B49-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B57-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-015 |
| filingDate |
2001-07-27^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4e2b64223748eb3ac3490bc76dbd46fd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_585e3682b9f1e8be594cab6e36e6983a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1dce116a3300e1dc16079bd862ee1b67
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_28283ce64db8a5ad674634a01fd5ed9d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4fc1ca66b983c5bfa9e0c64e30a541dc |
| publicationDate |
2002-01-30^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-1175964-A2 |
| titleOfInvention |
Polishing surface temperature conditioning system for a chemical mechanical planarization process |
| abstract |
The present invention provides a polishing surface temperature conditioningnapparatus for use with a polishing system having a polishing surface. In onenadvantageous embodiment, the polishing surface temperature conditioning apparatusncomprises a fluid delivery system coupled to the polishing system and configured tondeliver a fluid to a polishing surface of a polishing surface; and a heat exchanger that isncoupled to the fluid delivery system and configured to control a fluid temperature of thenfluid. The fluid temperature is chosen to effect a surface temperature of the polishingnsurface. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112969553-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102672613-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102672613-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015038056-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I694893-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8545634-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021299814-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9511475-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-101630629-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110666677-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110666677-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2007054125-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7883393-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102806525-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8172641-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I399805-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9550270-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102806525-A |
| priorityDate |
2000-07-27^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |