| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_69245755f3ce6c5fc7aba34401c4c744 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-3137 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3053
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-044
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-3407
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-547
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-505
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-546 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-305
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-04 |
| filingDate |
2001-08-10^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_95113156da6307ffe8da8ec5540db566 |
| publicationDate |
2002-02-27^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-1182271-A2 |
| titleOfInvention |
Apparatus and method for coating substrate |
| abstract |
Apparatus (10) for treating a substrate, comprising: a vacuum chamber (12); ansubstrate carrier (14) adapted to carry a substrate (16) to be treated; a source materialnholder (22) for holding a source material (34) with which the substrate (16) is to bentreated; and vaporising or sputtering means (20) for vaporising/sputtering the sourcenmaterial (34); wherein the source material holder (22) includes a positioning means (24)nfor relatively moving the source material (34) towards the substrate carrier (14). |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10358714-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3110985-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102010003106-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102010003106-B4 |
| priorityDate |
2000-08-11^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |