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filingDate 2000-10-23^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b22a1f3661e9ce5664cdd4e6ffc90547
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c5b0f77e114d86818d52a1446cb3b538
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publicationDate 2002-08-07^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber EP-1229389-A1
titleOfInvention Photosensitive resin composition, photosensitive element using the same, method for producing resist pattern, resist pattern and substrate having the resist pattern laminated thereon
abstract Disclosed are a photosensitive resin compositionncomprising a photosensitive resin (A), a photopolymerizationninitiator (B), and a flame retardant (C), in which a contentnof halogen atoms or antimony atoms in the flame retardant isn5% or less by weight; a photosensitive element using this; anmethod of manufacturing a resist pattern; a resist pattern;nand a resist pattern laminated substrate.
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