| abstract |
Disclosed is a radio frequency circuit having anmembrane structure and manufacturing method for the same.nThe radio frequency circuit has a circuit element formednon an insulating material plate having copper bonded onnboth surfaces or one surface thereof whereby a metalnsubstrate having a hollow bore and the insulating materialnplate forming the circuit element are bonded together.nThe circuit element is mounted with an active element onnwhich a lid having a partition wall is bonded fornpackaging. The hollow bore in the metal substrate, fornforming a membrane structure, is formed by press-blanking.nBecause the metal substrate is not wet-etched, dimensionsncontrol can be easily, precisely made on a hollow borenregion of the metal substrate. Furthermore, it isnpossible to shorten the working time on the hollow borenregion. |