| abstract |
New polymers and anti-reflective compositions including those polymers are provided. The polymer comprises recurring monomers according to the formula (I) wherein each R is OH, -CH2OH, -O-R1-O-X,or-CH¿2-O-R?1-O-X, each R1 is a branched or unbranched alkyl group, and each X is an aryl isocyanate. The inventive compositions can be used to form anti-reflective coatings having high etch rate and optical densities. |