| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_74973199515dbabd2310245aab03e282 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2221-1078 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76862
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76856
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76843
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76846
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4488
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C8-36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-452
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76888
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28556
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-7685
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F4-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-507
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76876
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-14 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C8-36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-448
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-452
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-507
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C28-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C30-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28 |
| filingDate |
2002-10-28^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aa5476e5d6c33622b23c8abb7b1b8de7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_535acb33cf12c3bace2090be7d59efbe
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_146d67a1a66fc491fc436983d8caa722
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4615cd2f490d080424279497f8bf4174
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_554dc325f046eabe81200e57043e8bde |
| publicationDate |
2005-02-23^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-1473379-A8 |
| titleOfInvention |
Metal barrier film production apparatus, metal barrier film production method, metal film production method, and metal film production apparatus |
| abstract |
A metal film production apparatus, comprising: a chambernaccommodating a substrate having a barrier metal film of anmetal nitride formed thereon; silicon-containing gas supplynmeans for supplying a gas containing silicon to a site abovena surface of the substrate; surface treatment plasmangeneration means which generates a gas plasma containingnsilicon to form nuclei of silicon atoms on a surface of thenbarrier metal film on the surface of the substrate; anmetallic etched member provided in the chamber; source gasnsupply means for supplying a source gas containing a halogennto an interior of the chamber between the substrate and thenetched member; plasma generation means which converts thensource gas containing the halogen into a plasma to generate ansource gas plasma so that the etched member is etched withnthe source gas plasma to form a precursor from a metalncomponent contained in the etched member and the source gas;nand control means which makes a temperature of the substratenlower than a temperature of the etched member to form thenmetal component of the precursor as a film on the barriernmetal film having the nuclei of silicon atoms formed on thensurface thereof. |
| priorityDate |
2001-11-14^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |