| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1a34d7d2e0d09a58cb7bf4a04c81162e |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G77-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D183-04 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G77-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D183-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-09 |
| filingDate |
2002-11-12^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1fb59421076efed54163d1a92aca6e68
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_70b83124f6c74c3399240e883490173e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_650f27548683ed454ca34cef92af79d0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aa2db480cfaea3b1cba6feb4b00dc379
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3c5ee00fc93e7a86d5f75be0169452f9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c5750bd4579ca0d0063b1cf72fcd3c90
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8bf3700af4419fa823edc05e3e47f014
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c5ce4527898e05ff8e98b169be95f3d7 |
| publicationDate |
2005-06-15^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-1478682-A4 |
| titleOfInvention |
ANTIREFLECTIVE LAYERS FOR PHOTOLITHOGRAPHY AND METHODS OF PREPARATION THEREOF |
| priorityDate |
2001-11-15^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |