| abstract |
X-ray microscopic inspection apparatus using a microfocus X-raynsource. The apparatus includes a magnetic superposition lens (1d) havingna magnetic field generating portion disposed in the vicinity of annelectron generating portion of an electron gun; reflected electronndetecting means having a detecting portion disposed above the target (3)nfor X-ray generation, electron image generating means for performingnimaging of a target surface utilizing the signals from the reflectednelectron detecting means for alignment including focus adjustment to thentarget for X-ray generation and astigmatism correction. Further, thenapparatus is equipped with functions such as a CT function , an electronnaxis alignment function, elemental analysis function, and a targetnswitching function. |