http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1635374-A1

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_069a92549123806a5d654dc036a676e9
classificationCPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-2446
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-2817
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-2441
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-05
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N23-225
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-29
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N23-225
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-05
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-147
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B15-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-09
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-244
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-153
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N23-20
filingDate 2004-04-26^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3e8aac862771a9e0e9a72978f3f60110
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_86056225dc4c30672104f49664b4bed1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d794cb510ddf1d0bfca6cebe2fe7673c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_866fe99d3c7d10788b7ce098d601c1b5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6f9318ed995a48f5baf8e3d78b752556
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bf13b53d1d63d519fa3bdbcd284c76fa
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a2cf52c5ac919c444834bdd56f49f1d6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e67d0a81c1e378e9a21a3840d080848f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_202cadaeddde05297674b5fc391f52e5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3c89059aadb7f972db8acb81e45567d9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f987da517db545fcc5ec67efdf268d79
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1499b0c7d681fe29118f4fb32692913f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_16f05ee62667b5b31cd8e0c286d62aaa
publicationDate 2006-03-15^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber EP-1635374-A1
titleOfInvention Electron beam device, electron beam inspection method, electron beam inspection device, pattern inspection method and exposure condition determination method
abstract A system for further enhancing speed, i.e. improving throughput in a SEM-type inspection apparatus is provided. n An inspection apparatus for inspecting a surface of a substrate produces a crossover from electrons emitted from an electron beam source 25·1, then forms an image under a desired magnification in the direction of a sample W to produce a crossover. When the crossover is passed, electrons as noises are removed from the crossover with an aperture, an adjustment is made so that the crossover becomes a parallel electron beam to irradiate the substrate in a desired sectional form. The electron beam is produced such that the unevenness of illuminance is 10% or less. n Electrons emitted from the sample W are detected by a detector 25·11.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2402976-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2402977-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11282675-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9966227-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8476588-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11099127-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016110859-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105588844-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10573491-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015110384-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104568979-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10892138-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11721521-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8937283-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2024733-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2024733-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110213512-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110213512-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110018616-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110018616-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2023060091-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I447385-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I564680-B
priorityDate 2003-05-09^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1271605-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1304717-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2002109090-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2002130262-A1
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3033151
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3440
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419554741
http://rdf.ncbi.nlm.nih.gov/pubchem/taxonomy/TAXID33120
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419523291
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226400643
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14808
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID977
http://rdf.ncbi.nlm.nih.gov/pubchem/gene/GID51593
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419499693
http://rdf.ncbi.nlm.nih.gov/pubchem/gene/GID83701
http://rdf.ncbi.nlm.nih.gov/pubchem/taxonomy/TAXID8060
http://rdf.ncbi.nlm.nih.gov/pubchem/anatomy/ANATOMYID8060
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID16773
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6131
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23968
http://rdf.ncbi.nlm.nih.gov/pubchem/anatomy/ANATOMYID1103
http://rdf.ncbi.nlm.nih.gov/pubchem/anatomy/ANATOMYID8083
http://rdf.ncbi.nlm.nih.gov/pubchem/gene/GID398542
http://rdf.ncbi.nlm.nih.gov/pubchem/taxonomy/TAXID8083
http://rdf.ncbi.nlm.nih.gov/pubchem/gene/GID527938
http://rdf.ncbi.nlm.nih.gov/pubchem/anatomy/ANATOMYID33120
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226406400
http://rdf.ncbi.nlm.nih.gov/pubchem/gene/GID192311
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226406399
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458357694
http://rdf.ncbi.nlm.nih.gov/pubchem/gene/GID100037061

Showing number of triples: 1 to 99 of 99.