| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_60480587582bf8e0ca64c6076c0646ab |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J49-025
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J43-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-244
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3005 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-244
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J-
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J43-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J49-02 |
| filingDate |
2004-06-25^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2010-08-25^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b0f45a4411738fa035da2345415fc510
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4f675481e09efad63ada71dd04d6cdf9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_80eb2c7b6b9789cb8066f78e0de2c3ed
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_18077c992d61cb4650c627060e94666c |
| publicationDate |
2010-08-25^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-1636819-B1 |
| titleOfInvention |
Particle detector suitable for detecting ions and electrons |
| abstract |
A particle detector switchable from an ion detector to an electron detector includes an ion-to-electron converter and a scintillator detector. With one set of voltages on the components, the converter has minimal impact on the electron trajectories so the electrons are efficiently detected by the scintillator detector. With different voltage settings on the components, the detector can be operated in positive ion mode to collect positive ions with adequate efficiency for most FIB applications. The ion-to-electron converter is preferably in the shape of a cylinder or includes multiple parallel plates. |
| priorityDate |
2003-06-26^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |