patent/EP-1700167-A1

http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1700167-A1

Outgoing Links

Predicate	Object
assignee	http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7580c986f51e744d448b76d00ee1e279
classificationCPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-70825 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B7-023 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B7-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B7-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-7015 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B7-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-70191 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B13-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-70258
classificationIPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B13-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B7-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B7-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B7-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20
filingDate	2004-11-30^^<http://www.w3.org/2001/XMLSchema#date>
inventor	http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_36df633b659675306e4d33581da7e9ba http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c8192fa7ce978f08adf36ee345a5227a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5f262b88e04b5f70b5528fdfc91cf68b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5582d36fcb82b80c42a0a736284a214e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ab6a4585b1a603299b84df17b1e2402a
publicationDate	2006-09-13^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber	EP-1700167-A1
titleOfInvention	Replacement apparatus for an optical element
abstract	A replacement apparatus for an optical element mounted between two adjacent optical elements (2) in a lithography objective (1) has a holder (5) for the optical element (2a) to be replaced, which holder (5) can be moved into the lithography objective (1) through a lateral opening (6) in a housing (1a) of the same.
priorityDate	2003-12-23^^<http://www.w3.org/2001/XMLSchema#date>
type	http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate	Subject
isDiscussedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID135942679 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID727

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