| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_069a92549123806a5d654dc036a676e9 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23H5-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25F3-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23H5-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25F3-22 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25F3-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25F7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23H5-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23H5-08 |
| filingDate |
2007-09-04^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1acace02b105c6d84bac74f7e82c50cc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8ffd0a3db7c3e3c22bb33cab224676cf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e9ad667c7379f98316c4557b42ce6978
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_582f6dfdbb0c3c506a9166a8f0b8294f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_821245c5ad732ac45e7bf708d0ffb4e9 |
| publicationDate |
2008-03-05^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-1894656-A2 |
| titleOfInvention |
Electrolytic liquid for electrolytic polishing and electrolytic polishing method |
| abstract |
An electrolytic liquid is used for electrolytic polishing which can provide a processed surface having high flattening characteristics with a low voltage applied while ensuring a higher processing rate for an conductive material, and can remove an unnecessary conductive material and expose a barrier film without causing dishing, erosion, or etching at the interface between the barrier film and a metal (conductive material) . The electrolytic liquid for use in electrolytic polishing of a surface conductive material of a workpiece comprises an aqueous solution containing at least one organic acid or its salt, at least one strong acid having a sulfonic acid group, a corrosion inhibitor and a water-soluble polymeric compound. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2021115698-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1903132-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1903132-A3 |
| priorityDate |
2006-09-04^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |