| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_62f941494409aea84f621977c5f0ab81 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K85-657
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1225
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K85-621
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K10-466 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K10-476
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D471-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K10-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K10-474 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L51-05 |
| filingDate |
2011-10-05^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_16e90b7b39c4f0c721f67cb58b11ac50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6f96808126e1614e5349cd9c782b7158
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0d62a9a03a4eb90404f76528acb3e322
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aa24d9ea217a42fb09ee5fd7e1908215 |
| publicationDate |
2013-08-14^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-2625730-A1 |
| titleOfInvention |
Field-effect transistor and manufacturing process thereof |
| abstract |
A field-effect transistor includes a gate, a source and a drain; a semiconductor layer between the source and the drain; and a gate insulator between the gate and the semiconductor layer. The gate insulator comprises a first layer adjoining the semiconductor layer; and a second layer. The first layer is formed from an amorphous fluoropolymer having a first dielectric constant and a first thickness. The second layer has a second dielectric constant and a second thickness. The first dielectric constant is smaller than 3, the first thickness is smaller than 200 nm, the second dielectric constant is higher than 5, and the second thickness is smaller than 500 nm. |
| priorityDate |
2010-10-07^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |