| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_069a92549123806a5d654dc036a676e9 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2258-0216
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T137-85978
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2257-2066
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2257-204
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2257-553 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-74 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-74
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44 |
| filingDate |
2014-05-27^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1d2b31d91477e7082a9a1ae4573b04f9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cdf35cf2edc81267a2773096d05687cf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8cdc35b88ab316cf5e5c6f98291c655e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_314de864f94b63b548568fa691106a39
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_11fd85deba98bdbab950787df5dd26b3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bd6810138bf088f57c57cde65d42939d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5ca96d1e923204e05e0b53e1f3fd49a9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_01572f915db579b904ff881ccb169518
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ab01caef446308f3ed43a04ac1822e96 |
| publicationDate |
2014-12-24^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-2815800-A2 |
| titleOfInvention |
Vacuum pump with contaminant abatement function |
| abstract |
A vacuum pump with abatement function is used for evacuating a chamber of a manufacturing apparatus. The vacuum pump with abatement function includes a vacuum pump having a discharge port to which one or more abatement parts for treating an exhaust gas discharged from the vacuum pump to make the exhaust gas harmless are attached. The one or more abatement parts are selected, depending on the amount and kind of the exhaust gas discharged from the vacuum pump, from plural kinds of abatement parts which have different treatment types of exhaust gas and/or different treatment amounts of exhaust gas. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111315988-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2019092430-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2019092428-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2019092427-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2019092409-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111315987-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11542932-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2811161-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11519401-B2 |
| priorityDate |
2013-05-30^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |