http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2883978-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0ddb9f3656270bc5410be3679322fead |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-164 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05B17-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05B12-084 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-243 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05B33-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K50-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-545 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05B12-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05B17-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-54 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L51-50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L51-56 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L51-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B33-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-24 |
| filingDate | 2013-08-02^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a52738668e953f0a692589efc5ea5297 |
| publicationDate | 2015-06-17^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | EP-2883978-A1 |
| titleOfInvention | Vacuum deposition device and method for manufacturing organic el device |
| abstract | The present invention relates to a vacuum deposition device provided with a plurality of evaporators, and proposes the preferred combination of the evaporators and film forming materials. The vacuum deposition device includes a film forming chamber 2 and a series of discharge circuit 3 which evaporates the film forming materials and discharges the evaporated film forming materials toward a substrate. The discharge circuit 3 is constituted of: evaporating parts 10a to 10j, a manifold group 6; a film forming material discharge part 13; and a shutter member 8. In the film forming material discharge part 13, discharge openings 80, 81, 82 which are communicated with manifold portions 66, 67, 68 are distributed. Flow restrictions 85, 86, 87 are provided in the vicinity of open ends of the discharge openings 80, 81, 82. Open areas of the flow restrictions 85, 86, 87 differ from each other for the respective manifold portions 66, 67, 68. Consideration is taken such that the film forming materials 16a to 16j which are formed into layers having similar film thicknesses are filled into the evaporating parts 10a to 10j belonging to the same group. |
| priorityDate | 2012-08-13^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
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