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filingDate 2017-12-15^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_23f7614064d7290367e3e9903548eec5
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publicationDate 2019-11-06^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber EP-3563399-A1
titleOfInvention Optically addressed, thermionic electron beam device
abstract An electron beam source is provided that includes a vessel forming a chamber, a cathode disposed within the chamber, the cathode comprising a low dimensional electrically conductive material having an anisotropic restricted thermal conductivity, an electrode disposed in the chamber, the electrode being connectable to a power source for applying a positive voltage to the electrode relative to the cathode for accelerating free electrons away from the cathode to form an electron beam when the cathode is illuminated by electromagnetic (EM) radiation such that the cathode thermionically emits free electrons, and an electron emission window in the chamber for passing a generated electron beam out of the chamber. An electron microscope that incorporates the electron beam source is also provided.
priorityDate 2016-12-29^^<http://www.w3.org/2001/XMLSchema#date>
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