http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3677585-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_de498babb0c04a00ceb653738877b147 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C215-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45553 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45525 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F5-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-405 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F5-003 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F5-00 |
| filingDate | 2018-08-09^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f56d1111b5a3bcef192a704ada059ebc http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ec1251d19b8212592450a23389f44c77 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1a384b0dd8bc9e7c236ae673d124a708 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b0701845e5186301c029508797bd4590 |
| publicationDate | 2020-07-08^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | EP-3677585-A1 |
| titleOfInvention | Metal alkoxide compound, thin-film-forming raw material, and thin film production method |
| abstract | The present invention provides a metal alkoxide compound represented by the following general formula (1), a thin-film-forming raw material containing the same, and a thin film production method of forming a metal-containing thin film using the raw material:wherein R<sup>1</sup>represents a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, R<sup>2</sup>represents an isopropyl group, a sec-butyl group, a tert-butyl group, a sec-pentyl group, a 1-ethylpropyl group or a tert-pentyl group, R<sup>3</sup>represents a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, R<sup>4</sup>represents an alkyl group having 1 to 4 carbon atoms, M represents a scandium atom, an yttrium atom, a lanthanum atom, a cerium atom, a praseodymium atom, a neodymium atom, a promethium atom, a samarium atom, a europium atom, a gadolinium atom, a terbium atom, a dysprosium atom, a holmium atom, an erbium atom, a thulium atom, an ytterbium atom or a lutetium atom, and n represents the valence of the atom represented by M; here, when M is a lanthanum atom, R<sup>2</sup>is a sec-butyl group, a tert-butyl group, a sec-pentyl group, a 1-ethylpropyl group or a tert-pentyl group. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3901326-A4 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11623935-B2 |
| priorityDate | 2017-08-30^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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