| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_583921455dbbca934ea3541544426ba3 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-1501
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-06333
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-1471 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J1-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K15-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J3-021
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-1471
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-073 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K15-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J1-34 |
| filingDate |
2019-05-14^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4ca751edc78cffa132bddf887fbf8e87
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_70e8aa102c49cf06bacc0daf9875bad3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_10c4766245d6daa3bff33e007f8abfeb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_52d51bbb14080a97ad6f8f036db0f577 |
| publicationDate |
2021-03-24^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-3796361-A1 |
| titleOfInvention |
Incidence axis alignment method for electron gun equipped with photocathode, computer program, and electron gun equipped with photocathode |
| abstract |
The present invention addresses the problem of providing a method for automatically adjusting an electron beam emitted from an electron gun equipped with a photocathode to the incident axis of an electron optical system. n [Solution] n An incident axis alignment method for an electron gun equipped with a photocathode, nthe electron gun being capable of emitting an electron beam in a first state due to the photocathode being irradiated with excitation light, and nthe method including at least nan excitation light radiation step, na first excitation light irradiation position adjustment step for changing the irradiation position of the excitation light on the photocathode and adjusting the irradiation position of the excitation light, and nan electron beam center detection step for detecting whether a center line of the electron beam in the first state coincides with an incident axis of an electron optical system. |
| priorityDate |
2018-05-17^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |