http://rdf.ncbi.nlm.nih.gov/pubchem/patent/FR-2687779-A1

Outgoing Links

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assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a5100c68a6779bfcf79173f1745e5969
classificationCPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-43
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01P2015-0828
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01P15-125
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01P15-0802
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01L9-0073
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-78
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01P15-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01P15-125
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-78
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01L9-00
filingDate 1992-02-20^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d3151b0d2ad82ed727a947b4e2a03091
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ad98ae925d8b72e04189d34584dfc0d8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9229adc61dc6f5aaa5dbbeeb020bc78d
publicationDate 1993-08-27^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber FR-2687779-A1
titleOfInvention CAPACITIVE MICRO SENSOR WITH LATERAL PROTECTION AND MANUFACTURING METHOD.
abstract The present invention relates to a capacitive micro-sensor comprising a sandwich of three silicon wafers (1, 2, 3), a peripheral strip on each side of the central wafer being attached to a corresponding strip on the opposite side of a wafer external by means of an insulating strip (5, 6), characterized in that the lateral faces of said sandwich are notched at the level of the outcrop of each of said insulating strips.
priorityDate 1992-02-20^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

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isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5461123
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