| abstract |
According to the invention, a pumping system comprises at least one multistage pump unit (2) (5, 6, 7, 8, 9) and a pumped gas treatment system having at least one plasma source (15). ) inserted in an inter-stage pipe (10) inside the body of the pumping unit (2), to generate a plasma which at least partially decomposes certain gases passing through the pumping unit (2). This considerably reduces the size of the pumped gas treatment system, improves its efficiency, and can be achieved a pumping and gas treatment system of sufficiently small size to be placed in close proximity to the process chambers. |