http://rdf.ncbi.nlm.nih.gov/pubchem/patent/FR-3057698-B1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d79a3714d75520adeea100b7ed428a77 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76256 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-265 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-322 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-20 |
| filingDate | 2017-10-12^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2021-05-14^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9cd788742eefb58e3884c31b40052c82 |
| publicationDate | 2021-05-14^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | FR-3057698-B1 |
| titleOfInvention | PROCESS FOR THE PRODUCTION OF A SILICON GLUED SLICE AND SILICON GLUED SLICE |
| abstract | There is provided a method of producing a silicon bonded wafer (100) and a silicon bonded wafer (100) which enables a getterization capability to be maintained after the silicon bonded wafer (100) has been produced and even after the bonded silicon wafer (100) has undergone another heat treatment in a device forming process or the like. The method may include a bonding step of bonding a surface of a wafer (110) used for a support substrate and a surface of a wafer (120) used for an active layer (125) according to a bonding process. vacuum at normal temperature; a thinning step of thinning the wafer (120) used for the active layer (125) and converting the thinned wafer (120) into the active layer (125); and a heat treatment step, carried out after the bonding step. |
| priorityDate | 2016-10-14^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559541 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5461123 |
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