| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a6deb71bf6c36e5b39c0eb58d053f0cc |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D13-02 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D11-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D11-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D11-026
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D11-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D11-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D11-024
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D11-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C28-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D11-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D11-26 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C28-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D11-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D11-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D11-16 |
| filingDate |
2013-04-29^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_26fb438a50ce6caac94a97cbc04d99a7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c2aeb6f3a9e43f26e457d94cd2486aca
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2bcd713f67f5cc88be500e5423c80bab |
| publicationDate |
2014-11-05^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
GB-2513575-A |
| titleOfInvention |
Corrosion and erosion-resistant mixed oxide coatings for the protection of chemical and plasma process chamber components |
| abstract |
In a method for producing corrosion and erosion-resistant mixed oxide coatings on a metal substrate, a surface of the substrate is oxidised and converted into a first coating compound comprising a primary oxide of the metal by a plasma electrolytic oxidation (PEO) process and one or more secondary oxide compounds comprising oxides of secondary elements not present in conventional alloys of the substrate metals at significant (>2 wt%) levels is added to the first oxide coating, wherein the source of the secondary element(s) is at least one of a soluble salt of the secondary element(s) in the electrolyte, an enrichment of the surface of the substrate with secondary element(s) prior to PEO processing and a suspension of the secondary element(s) or oxide(s) of the secondary element(s) applied to the oxide of the metal after this has been formed by the PEO process. Also disclosed is a corrosion and erosion-resistant mixed oxide coating on a substrate made of metal. |
| priorityDate |
2013-04-29^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |