| abstract |
(57) [Summary] [PROBLEMS] A heat treatment apparatus that suppresses an increase in variation in heating in a heat treatment apparatus corresponding to an increase in diameter and size of a substrate to be processed, and removes an influence of outgas from the substrate during the heat treatment. Realize the heat treatment method. A substrate to be processed 11 is loaded on a loading position 13a of a transport belt 13, and the transport belt 13 is moved in a transport direction 14a. Transport to Loading position 1 due to movement of the conveyor belt 13 The rotation gear 15 attached to the back surface of 3a rotates at the loading position 13a by the guide gear 17, and the substrate 11 to be processed is conveyed under the heating source 12 while rotating. The substrate to be processed passes while rotating even under a heat source with poor heat uniformity, dispersing the temperature variation in the surface of the substrate to be processed during the heat treatment, realizing uniform heat treatment on the substrate to be treated. I do. |