http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2000187328-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6c8d4dc7bd1a30d8fda907fceaeb4e69 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08K5-41 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L61-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L25-18 |
| filingDate | 1998-12-22^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f20413632738edd76fa5b86945ef23bc |
| publicationDate | 2000-07-04^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2000187328-A |
| titleOfInvention | Radiation-sensitive composition |
| abstract | (57) [Abstract] [Problem] Sensitivity, resolution, depth of focus, pattern shape, P Provided is a radiation-sensitive composition having good ED resistance. SOLUTION: A resin (a) in which at least a part of a phenolic hydroxyl group of an alkali-soluble resin having a phenolic hydroxyl group is protected by an acid-decomposable protecting group having a structure of the following general formula (1), having a phenolic hydroxyl group Radiation-sensitive composition containing a resin (b) in which at least a part of a phenolic hydroxyl group of an alkali-soluble resin is protected by an acid-decomposable protecting group having a structure of the following general formula (2) and a photoacid generator (c) The weight average molecular weight of the resin (a) (a) A radiation-sensitive composition, wherein the relationship of Mwa ≦ Mwb is satisfied when the weight average molecular weight of the resin (b) is Mwb. Embedded image (Wherein, R 1 and R 2 each represent a hydrogen atom or an optionally substituted alkyl group, and R 1 and R 2 may combine to form a ring. R 3 represents C 1 -C 12 R 2 may combine with R 3 to form a ring. R 4 represents a C 1 -C 3 alkyl group or an alkoxy group.) |
| priorityDate | 1998-12-22^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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