http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2000194127-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_424db9d56b06a23aed410fcf5df652f3 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 1999-10-19^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_234f320334f9a97fe9e39a3fe7148a86 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dfae59e959d199a8d35045973e8bd022 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c8e054927dda4762faf969d5e11a8f87 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b81b1c5a5d52d3acb14f3fa5d54f296c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_77604ba9f3fa97920f317d0ffa7d5dfe |
| publicationDate | 2000-07-14^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2000194127-A |
| titleOfInvention | Resist material and pattern forming method |
| abstract | (57) Abstract: (A) a resin whose solubility in an alkali developing solution is changed by the action of an acid, (B) a compound which generates an acid upon irradiation, (C) tetramethylene sulfone, (D) A chemically amplified resist material containing a solvent other than tetramethylene sulfone. The resist material of the present invention is excellent in solubility, storage stability and coatability by using tetramethylene sulfone as a solvent, and has little line width variation and shape deterioration even when PED is used for a long time. It has little foreign matter after coating, development, and peeling, has excellent pattern profile shape after development, has high resolution suitable for microfabrication, and exhibits great power especially in deep ultraviolet lithography. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2009035044-A1 |
| priorityDate | 1998-10-19^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
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