http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2001036218-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_88fbcd2a70a3c49d0aed69a000d55909 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J9-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G09F9-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G09F9-313 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-12 |
| filingDate | 1999-07-26^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_42c6164867b3bdc8768e2762b793c831 |
| publicationDate | 2001-02-09^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2001036218-A |
| titleOfInvention | Pattern formation method |
| abstract | (57) [Problem] To provide a pattern forming method with good pattern formability using a ceramic material. SOLUTION: After forming a photosensitive resin composition layer on a substrate, exposure and development are performed through a pattern mask to form an uneven resist pattern on the substrate, and then a ceramic material is formed in a concave portion of the resist pattern. In a pattern forming method in which the paste containing the ceramic material is filled and then the resist pattern and the paste containing the ceramic material are fired, or the resist pattern is removed with a chemical solution, and then the paste containing the ceramic material is fired, the silane-based paste is used for the paste containing the ceramic material. A pattern forming method for compounding a compound. |
| priorityDate | 1999-07-26^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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