| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fcc0b66123940d1b32783569ebfa2d45 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D183-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L83-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312 |
| filingDate |
1999-12-24^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f07e51afdf7d05bd6286bcdce8196bfd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_14e72452304c1b9b5685afc273d05e8b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_707b65ed537e0dcdcd0ac90952ad93d5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9d1c294a98f93161b5852e8b601c0f25 |
| publicationDate |
2001-07-03^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2001181506-A |
| titleOfInvention |
Film forming composition, film forming method and low density film |
| abstract |
(57) 【Abstract】PROBLEM TO BE SOLVED: To obtain a low density film which is useful as an interlayer insulating film in a semiconductor device or the like, has excellent dielectric constant properties and water absorption properties, and has a small void size, and is also excellent in storage stability. To provide a film-forming composition. A (A) R a Si (OR 1) a compound represented by 4-a, Si (OR 2 ) compounds represented by 4, and R 3 b (R 4 O) 3-b Si- ( R 7) d -Si A hydrolyzed condensate obtained by hydrolyzing and condensing at least one silane compound selected from the group of compounds represented by (OR 5 ) 3-c R 6 c in the presence of an alkali catalyst; (B) A film-forming composition containing an organic compound having a boiling point or a decomposition temperature of 250 to 450°C. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006291089-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2003253205-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2003253204-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2003253206-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2003277509-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018035226-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011154214-A |
| priorityDate |
1999-12-24^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |