| abstract |
(57) [Summary] [Problem] Decompose unnecessary SF 6 at an effective speed, Obtain a detoxification method. A helium gas and an inert gas are introduced into a cylindrical insulating tube from a plasma gas inlet, and a high-frequency induction coil is energized to form an inductively coupled plasma. Processing gas inlet 2 SF 6 gas is introduced through 5 and heated and decomposed by inductively coupled plasma. The decomposed SF 6 is sent to the reaction vessel 26, and is reacted with CaO powder 32, which is a reaction fixing material injected and introduced from the powder inlet 29, to be fixed and made harmless. |