| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32192
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32229 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-511
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 |
| filingDate |
1998-09-24^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2001-10-16^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2001518678-A |
| titleOfInvention |
Large area microwave plasma device with adaptable applicator |
| abstract |
(57) [Summary]nA microwave device for maintaining a substantially uniform plasma over a relatively large area. The microwave device includes a vacuum vessel for maintaining a plasma in a plasma region. The apparatus further comprises a non-evanescent microwave applicator having means for controlling a cutoff frequency. Microwave applicators may consist of a waveguide and a volume of dielectric material disposed therein. Alternatively, the microwave applicator may consist of a ridge waveguide. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013098337-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011035327-A |
| priorityDate |
1997-10-01^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |