| abstract |
(57) [Summary] [PROBLEMS] To reduce the size of the entire apparatus, shorten the production lead time, reduce costs, simplify maintenance, etc., and obtain a reliable sealing state to improve reliability. In addition, the gas control device to be used is not restricted by the difference in the type, so that the convenience can be improved. SOLUTION: A plurality of intermediate flow path blocks 11 and end flow path blocks 12 are arranged in a recess 36 of a base 10. Base 1 The mounting devices 13 and 14 are mounted on the projecting portions 35 of both sides. The first gas passages 17 and 31 and the second gas passages 18 and 32 in the plurality of types of gas control devices 2 to 9 are connected to the gas passages 4 of the passage blocks 11 and 12 by the attachment devices 13 and 14. In the positioning state where the gas control devices 2 to 9 are communicated with the gas control devices 0 to 47 via the metal gaskets, the flow path blocks 11, 1 Pressurize the gas control devices 2 to 9 to the flow channel block 1 1 and 12 are connected. |