http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2002151776-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_375e56c930a010a3edfedac830bb8bb1 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S3-13 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S3-225 |
| filingDate | 2000-11-13^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_efc2e7fe80c864a9e8632e10a59cf577 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aaef72ba1c2b5395a90dd59e73740994 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a9de62b1add252045a4d2739bab5e7cf |
| publicationDate | 2002-05-24^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2002151776-A |
| titleOfInvention | Vacuum ultraviolet laser device |
| abstract | (57) [Problem] To provide a vacuum ultraviolet laser device capable of suppressing both the amount of light incident on an etalon and the divergence angle of the light. SOLUTION: A laser chamber 11, a plurality of minute area reflecting portions 21 for reflecting a part of incident light downward, The beam splitter 17 includes a transmission unit 22 that transmits the remaining light to the right as output laser light in the right direction, an etalon 34 that narrows the spectrum width of the light reflected from the reflection unit 21, and the like. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013065903-A |
| priorityDate | 2000-11-13^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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