| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_80787665b837ed3eb503bbcd27c0043a |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8244
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8234
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8238
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-78
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-822
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-088
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-092 |
| filingDate |
2001-03-27^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c5e01ed0885475b753202a00586f6b97 |
| publicationDate |
2002-10-04^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2002289696-A |
| titleOfInvention |
Semiconductor device manufacturing method and semiconductor device |
| abstract |
[PROBLEMS] To improve the degree of element integration of a semiconductor device. SOLUTION: In an SRAM part, a p-type high-concentration well BPM and an n-type high-concentration well BNM having a distribution such that an impurity concentration becomes relatively high are formed at a deep position of a semiconductor substrate 1S in the whole area thereof, In the logic circuit portion, p-type high-concentration wells BPL and n-type high-concentration wells having a distribution such that the impurity concentration is relatively high at a deep position in the semiconductor substrate 1S are provided in regions other than the active region L of nMISQnl and pMISQpl. Form BNL. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006135322-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011181694-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017130608-A |
| priorityDate |
2001-03-27^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |